Document Type

Article

Publication Date

7-2007

Abstract

Superconducting granular aluminium/palladium bilayer microbolometers with subnanosecond response can be easily fabricated using an all lift-off process with image-reversal lithography. The palladium capping layer allows for convenient and reproducible Ohmic contacts to be made to the device. We report their fabrication, resistance–current calibration, responsivity and response time. Finally, a deconvolution algorithm is used to improve the time resolution to approximately 1 ns while obtaining the incident photon and phonon fluxes in both direct photoexcitation and phonon heat pulse experiments.

Comments

This article first appeared in the July 2007 issue of Measurement Science and Technology and is reprinted with permission. A final version can be found at http://iopscience.iop.org/0957-0233/18/7/N04

©2007 IOP Publishing

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