Superconducting granular aluminium/palladium bilayer microbolometers with subnanosecond response can be easily fabricated using an all lift-off process with image-reversal lithography. The palladium capping layer allows for convenient and reproducible Ohmic contacts to be made to the device. We report their fabrication, resistance–current calibration, responsivity and response time. Finally, a deconvolution algorithm is used to improve the time resolution to approximately 1 ns while obtaining the incident photon and phonon fluxes in both direct photoexcitation and phonon heat pulse experiments.
Wilson TE. The fabrication and characterization of granular aluminium/palladium bilayer microbolometers. Meas Sci Technol. 2007; 18(7): N53-N59.