Microfabrication Using Elastomeric Stamp Deformation
Elastomeric stamp deformation has been utilized for the contact printing (CP) of self-assembled monolayers (SAMs) and, more recently, polymers and proteins. Here, we take advantage of this well-studied phenomenon to fabricate a series of new metal thin-film patterns not present on the original stamp. The rounded patterns are of nanoscale thickness, long-range order, and are created from elastomeric stamps with only straightedged features. The metal was printed onto the surface of an α,ω-alkanedithiol self-assembled monolayer (SAM). The new shapes are controlled by a combination of stamp geometry design and the application of external pressure. Previously published rules on stamp deformation for contact printing of SAMs are invalid because the coating is instead a thin-metal film. This method represents a new pathway to micropatterning metal thin films, leading to shapes with higher complexity than the original lithographic masters.
Fan, X., Tran, D. T., Brennan, D. P., Oliver, S. R. (2006). Microfabrication using elastomeric stamp deformation. The Journal of Physical Chemistry B, 110(24): 11986-11990.